¡¡¡¡LABORATORY OF PHYSICS OF INTERFACES AND THIN FILMS

¡¡¡¡Main Research Activities

¡¡¡¡Silicon based thin films and nanomaterials

¡¡¡¡Large area electronic applications

¡¡¡¡Carbone nanotubes and applications

¡¡¡¡Polarimetric instrumentation and applications

¡¡¡¡Overview

¡¡¡¡Staff : 56 persons including 26 permanents, 8 teachers at Ecole Polytechnique, 15 PhD and 3 Master students

¡¡¡¡Occupied area (inside Ecole polytechnique campus) : about 1000 m2

¡¡¡¡Budget : about 2 M€ per year (including salaries) including 0.5 M of grants and industrial contracts

¡¡¡¡Know-How

¡¡¡¡Plasma synthesis of semiconductor thin films, amorphous, polymorphous or microcrystalline

¡¡¡¡silicon alloys dielectric films

¡¡¡¡monitoring and real time control of thin film growth by spectroellipsometry

¡¡¡¡cluster-surface interaction

¡¡¡¡Molecular dynamics simulations

¡¡¡¡Thin film photovoltaic devices

¡¡¡¡Thin film transistors for large area electronic applications

¡¡¡¡Carbon thin films and nanotubes synthesis

¡¡¡¡Development of spectroscopic ellipsometers and polarimeters

¡¡¡¡Applications of polarimetry

¡¡¡¡Methods and facilities

¡¡¡¡Plasma Enhanced Chemical Vapor Deposition (PECVD) based on radiofrequency discharges

¡¡¡¡PECVD using Distributed Electron Cyclotron Resonance

¡¡¡¡Hot Wire CVD

¡¡¡¡In situ spectroellipsometry analysis of PECVD

¡¡¡¡Spectroellipsometry from deep UV to infrared

¡¡¡¡Raman spectroscopy

¡¡¡¡Time Resolved Microwave Conductivity

¡¡¡¡Surface science instrumental set-up

¡¡¡¡Application area

¡¡¡¡Plasma processes

¡¡¡¡Solar cells

¡¡¡¡Large area electronic applications (AMLCD, OLED)

¡¡¡¡Photodetection

¡¡¡¡Thin film coatings

¡¡¡¡Instrumentation in optics

¡¡¡¡Optical metrology in microelectronics

¡¡¡¡Biomedical applications of polarimetry

Link£º

www.lpicm.polytechnique.fr/jsp/accueil.jsp